Main content

X-ray Absorption Spectroscopy of Ultrathin Nickel Silicide Films: A Theoretical and Experimental Investigation

Show simple item record

dc.contributor.advisor Jiang, De-Tong
dc.contributor.author Arthur, Zachary
dc.date.accessioned 2013-04-16T13:42:11Z
dc.date.available 2013-04-16T13:42:11Z
dc.date.copyright 2013-04
dc.date.created 2013-04-04
dc.date.issued 2013-04-16
dc.identifier.uri http://hdl.handle.net/10214/6380
dc.description.abstract Previous studies have attempted to probe the structure of ultra-thin Nickel silicide films as they evolve in the manufacturing process with limited success. These studies have used ultra-thin Nickel silicide films that were quenched during the manufacturer's annealing process at select temperatures. This study aims to determine the structure of quenched ultra-thin Ni-Si films using Grazing Incidence X-Ray Absorption Near Edge Spectroscopy (GI-XANES) and ab-initio calculations (FDMNES). Successful calculations were prepared for the δ and θ Ni2Si phases, as well as the Ni3Si2, NiSi and NiSi2 phases. The GI-XANES experimental data was taken at the Canadian Light Source, at the Hard X-Ray Microanalysis Beamline (HXMA). XANES and FDMNES are used to identify two phases of the ultra-thin films: the as-deposited phase as a low-ordered Ni3Si2 phase, and the epitaxial NiSi2 phase was found in samples annealed past 400˚C. en_US
dc.language.iso en en_US
dc.rights.uri http://creativecommons.org/licenses/by-nc-sa/2.5/ca/ *
dc.subject Nickel en_US
dc.subject Silicides en_US
dc.subject Thin Film en_US
dc.subject X-ray en_US
dc.subject Absorption en_US
dc.title X-ray Absorption Spectroscopy of Ultrathin Nickel Silicide Films: A Theoretical and Experimental Investigation en_US
dc.type Thesis en_US
dc.degree.programme Physics en_US
dc.degree.name Master of Science en_US
dc.degree.department Department of Physics en_US
dc.rights.license All items in the Atrium are protected by copyright with all rights reserved unless otherwise indicated.


Files in this item

Files Size Format View Description
Arthur_Zachary_201304_MSc.pdf 6.999Mb PDF View/Open Thesis

This item appears in the following Collection(s)

Show simple item record

http://creativecommons.org/licenses/by-nc-sa/2.5/ca/ Except where otherwise noted, this item's license is described as http://creativecommons.org/licenses/by-nc-sa/2.5/ca/